Use of surfactants for improved particle performance of dHF-based cleaning recipes

  • R. Vos
  • , K. Xu
  • , M. Lux
  • , W. Fyen
  • , R. Singh
  • , Z. Chen
  • , P. Mertens
  • , Z. Hatcher
  • , M. Heyns

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Scopus citations

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Material Science