Abstract
A method to measure programmed charges in EEPROM devices is presented. The measurement of the charges was made with subtraction of images captured using a laser timing probe. The effect of the charges is expressed over the captured images due to the plasma dispersion effect.
| Original language | English |
|---|---|
| Article number | 6557018 |
| Pages (from-to) | 304-310 |
| Number of pages | 7 |
| Journal | IEEE Transactions on Device and Materials Reliability |
| Volume | 14 |
| Issue number | 1 |
| DOIs | |
| State | Published - Mar 2014 |
Keywords
- Measurement by laser beam
- Optics
- measurements technique
- microscopy
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