Usage of laser timing probe for sensing of programmed charges in EEPROM devices

Liron Bidani; Oded Baharav; Moshe Sinvani; Zeev Zalevsky

doi:10.1109/tdmr.2013.2272218

Usage of laser timing probe for sensing of programmed charges in EEPROM devices

Liron Bidani, Oded Baharav, Moshe Sinvani, Zeev Zalevsky

Research output: Contribution to journal › Article › peer-review

7 Scopus citations

Abstract

A method to measure programmed charges in EEPROM devices is presented. The measurement of the charges was made with subtraction of images captured using a laser timing probe. The effect of the charges is expressed over the captured images due to the plasma dispersion effect.

Original language	English
Article number	6557018
Pages (from-to)	304-310
Number of pages	7
Journal	IEEE Transactions on Device and Materials Reliability
Volume	14
Issue number	1
DOIs	https://doi.org/10.1109/tdmr.2013.2272218
State	Published - Mar 2014

Keywords

Measurement by laser beam
Optics
measurements technique
microscopy

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10.1109/tdmr.2013.2272218

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title = "Usage of laser timing probe for sensing of programmed charges in EEPROM devices",

abstract = "A method to measure programmed charges in EEPROM devices is presented. The measurement of the charges was made with subtraction of images captured using a laser timing probe. The effect of the charges is expressed over the captured images due to the plasma dispersion effect.",

keywords = "Measurement by laser beam, Optics, measurements technique, microscopy",

author = "Liron Bidani and Oded Baharav and Moshe Sinvani and Zeev Zalevsky",

year = "2014",

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AU - Bidani, Liron

AU - Baharav, Oded

AU - Sinvani, Moshe

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AB - A method to measure programmed charges in EEPROM devices is presented. The measurement of the charges was made with subtraction of images captured using a laser timing probe. The effect of the charges is expressed over the captured images due to the plasma dispersion effect.

KW - Measurement by laser beam

KW - Optics

KW - measurements technique

KW - microscopy

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Usage of laser timing probe for sensing of programmed charges in EEPROM devices

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