Fingerprint
Dive into the research topics of 'Ultraviolet light enhancement of Ta2O5 dry etch rates'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Ultraviolet light enhancement of Ta2O5 dry etch rates
K. P. Lee, H. Cho, R. K. Singh, S. J. Pearton, C. Hobbs, P. Tobin
Research output: Contribution to journal › Article › peer-review
3
Scopus
citations