Abstract
Self-assembled monolayers (SAMs) bearing sulfonate (-S03H) surface functional groups, on single-crystal Si wafers, were used as substrates for the deposition of Ti02 thin films from aqueous solutions. Polycrystalline Ti02 thin films over 50 nm thick formed in 2 h by hydrolysis of TiCl4 in aqueous HC1 solutions at 80 °C. The films were pore-free, showed excellent adherence and uniformity, and consisted of anatase crystallites 2–4 nm in diameter. Annealing at temperatures up to 600 °C caused coarsening of the anatase grains, but no loss of adherence or structural integrity.
| Original language | English |
|---|---|
| Pages (from-to) | 692-698 |
| Number of pages | 7 |
| Journal | Journal of Materials Research |
| Volume | 10 |
| Issue number | 3 |
| DOIs | |
| State | Published - 1995 |
| Externally published | Yes |
Bibliographical note
Funding Information:This work was supported by the Air Force Office of Scientific Research with supplemental funding from an Augmentation Award for Scientific and Engineering Research Training. The assistance of Dr. Wayne Jennings with the surface analysis, Mr. John Sears with TEM, and helpful discussions with Ms. Mou Maiti, are gratefully acknowledged.
Funding
This work was supported by the Air Force Office of Scientific Research with supplemental funding from an Augmentation Award for Scientific and Engineering Research Training. The assistance of Dr. Wayne Jennings with the surface analysis, Mr. John Sears with TEM, and helpful discussions with Ms. Mou Maiti, are gratefully acknowledged.
| Funders | Funder number |
|---|---|
| Air Force Office of Scientific Research |