Symposium Proceedings: Chemical-Mechanical Polishing 2000-Fundamentals and Materials Issues: Preface

  • R. K. Singh
  • , R. Bajaj
  • , M. Moinpour
  • , M. Meuris

Research output: Contribution to journalEditorial

7 Scopus citations
Original languageEnglish
Pages (from-to)ix
JournalMaterials Research Society Symposium - Proceedings
Volume613
StatePublished - 2000
EventChemical-Mechanical Polishing 2000-Fundamentals and Materials Issues - San Francisco, CA, United States
Duration: 26 Apr 200027 Apr 2000

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