| Original language | English |
|---|---|
| Pages (from-to) | ix |
| Journal | Materials Research Society Symposium - Proceedings |
| Volume | 613 |
| State | Published - 2000 |
| Event | Chemical-Mechanical Polishing 2000-Fundamentals and Materials Issues - San Francisco, CA, United States Duration: 26 Apr 2000 → 27 Apr 2000 |
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