Original language | English |
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Pages (from-to) | ix |
Journal | Materials Research Society Symposium - Proceedings |
Volume | 613 |
State | Published - 2000 |
Event | Chemical-Mechanical Polishing 2000-Fundamentals and Materials Issues - San Francisco, CA, United States Duration: 26 Apr 2000 → 27 Apr 2000 |
Symposium Proceedings: Chemical-Mechanical Polishing 2000-Fundamentals and Materials Issues: Preface
R. K. Singh, R. Bajaj, M. Moinpour, M. Meuris
Research output: Contribution to journal › Editorial
7
Scopus
citations