Abstract
The formation and evolution of defects induced by 100 MeV Si7+ ion irradiation in the Au/n-Si (1 0 0) Schottky barrier structure were studied and correlated with the electrical characteristics of the structure. The Schottky barrier decreases to 0.67 0.01 eV after irradiation at a fluence of 1 × 1011 ions cm-2 and remains immune to further irradiation up to a fluence of 1 × 1012 ions cm-2. A combination of in situ deep level transient spectroscopy and current-voltage measurements of Au/n-Si diodes demonstrates that 100 MeV silicon ion irradiation introduces a hydrogen related defect complex, which has a major influence on the Schottky barrier height and the leakage current in the irradiated structure.
Original language | English |
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Article number | 105105 |
Journal | Journal Physics D: Applied Physics |
Volume | 41 |
Issue number | 10 |
DOIs | |
State | Published - 21 May 2008 |
Externally published | Yes |