Surface Micromachining of beta-SiC Using Laser-Assisted Photoelectrochemical Etching

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Original language	American English
Title of host publication	Amorphous and Crystalline SiC III
Editors	G. L. Harris, M. G. Spencer, C. Y. Yang
Publisher	Springer Verlag, Berlin Heidelberg
State	Published - 1992

Place of conference:USA

Cite this

@inproceedings{cebcf7cc863049cab0e066f65c2cf1a2,

title = "Surface Micromachining of beta-SiC Using Laser-Assisted Photoelectrochemical Etching",

author = "J. Shor and X.G. Zhang and M.N. Ruberto and R.M. Osgood",

note = "Place of conference:USA",

year = "1992",

language = "American English",

editor = "Harris, \{G. L.\} and Spencer, \{M. G.\} and Yang, \{C. Y.\}",

booktitle = "Amorphous and Crystalline SiC III",

publisher = "Springer Verlag, Berlin Heidelberg",

}

TY - GEN

T1 - Surface Micromachining of beta-SiC Using Laser-Assisted Photoelectrochemical Etching

AU - Shor, J.

AU - Zhang, X.G.

AU - Ruberto, M.N.

AU - Osgood, R.M.

N1 - Place of conference:USA

PY - 1992

Y1 - 1992

M3 - Conference contribution

BT - Amorphous and Crystalline SiC III

A2 - Harris, G. L.

A2 - Spencer, M. G.

A2 - Yang, C. Y.

PB - Springer Verlag, Berlin Heidelberg

ER -