Surface Micromachining of beta-SiC Using Laser-Assisted Photoelectrochemical Etching

J. Shor, X.G. Zhang, M.N. Ruberto, R.M. Osgood

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Original languageAmerican English
Title of host publicationAmorphous and Crystalline SiC III
EditorsG. L. Harris, M. G. Spencer, C. Y. Yang
PublisherSpringer Verlag, Berlin Heidelberg
StatePublished - 1992

Bibliographical note

Place of conference:USA

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