Surface-Acoustic-Wave Characterization of Thin Layer Deposition on a Standard Silicon-Photonic Circuit
- Mirit Hen
- , Dvir Munk
- , Moshe Katzman
- , Maayan Priel
- , Sarah Taragin
- , Avi Zadok
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review
2
Scopus
citations