Surface-acoustic-wave characterization of thin layer deposition on a standard silicon-photonic circuit

Keyphrases

• Thin Film Deposition 100%
• Surface Acoustic Wave 100%
• Wave Characterization 100%
• Silicon Photonic Circuits 100%
• Acoustics 50%
• Aluminum Oxide 50%
• Small Changes 50%
• Silicon-on-insulator 50%
• Microwave Photonic Filter 50%
• Photonic Circuits 50%
• Acoustic Velocity 50%
• Integrated Microwave Photonics 50%

Physics

• Silicon Photonics 100%
• Acoustic Wave 100%
• Photonics 50%
• Microwave Photonics 50%
• Acoustic Velocity 50%