Surface-acoustic-wave characterization of thin layer deposition on a standard silicon-photonic circuit

Mirit Hen; Dvir Munk; Moshe Katzman; Maayan Priel; Sarah Taragin; Avi Zadok

doi:10.1364/cleo_si.2020.sth1r.3

Surface-acoustic-wave characterization of thin layer deposition on a standard silicon-photonic circuit

Mirit Hen, Dvir Munk, Moshe Katzman, Maayan Priel, Sarah Taragin, Avi Zadok

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

A thin layer of alumina is characterized using a surface acoustic wave photonic circuit in standard silicon on insulator. Small changes in acoustic velocity are identified by an integrated microwave photonic filter, through acoustic delays.

Original language	English
Title of host publication	CLEO
Subtitle of host publication	Science and Innovations, CLEO_SI 2020
Publisher	Optica Publishing Group (formerly OSA)
ISBN (Print)	9781943580767
DOIs	https://doi.org/10.1364/cleo_si.2020.sth1r.3
State	Published - 2020
Event	CLEO: Science and Innovations, CLEO_SI 2020 - Washington, United States Duration: 10 May 2020 → 15 May 2020

Publication series

Name	Optics InfoBase Conference Papers
Volume	Part F183-CLEO-SI 2020
ISSN (Electronic)	2162-2701

Conference

Conference	CLEO: Science and Innovations, CLEO_SI 2020
Country/Territory	United States
City	Washington
Period	10/05/20 → 15/05/20

Bibliographical note

Publisher Copyright:
© OSA 2020 © 2020 The Author (s)

Access to Document

10.1364/cleo_si.2020.sth1r.3

Cite this

Hen, M., Munk, D., Katzman, M., Priel, M., Taragin, S., & Zadok, A. (2020). Surface-acoustic-wave characterization of thin layer deposition on a standard silicon-photonic circuit. In CLEO: Science and Innovations, CLEO_SI 2020 Article STh1R.3 (Optics InfoBase Conference Papers; Vol. Part F183-CLEO-SI 2020). Optica Publishing Group (formerly OSA). https://doi.org/10.1364/cleo_si.2020.sth1r.3

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title = "Surface-acoustic-wave characterization of thin layer deposition on a standard silicon-photonic circuit",

abstract = "A thin layer of alumina is characterized using a surface acoustic wave photonic circuit in standard silicon on insulator. Small changes in acoustic velocity are identified by an integrated microwave photonic filter, through acoustic delays.",

author = "Mirit Hen and Dvir Munk and Moshe Katzman and Maayan Priel and Sarah Taragin and Avi Zadok",

note = "Publisher Copyright: {\textcopyright} OSA 2020 {\textcopyright} 2020 The Author (s); CLEO: Science and Innovations, CLEO_SI 2020 ; Conference date: 10-05-2020 Through 15-05-2020",

year = "2020",

doi = "10.1364/cleo_si.2020.sth1r.3",

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Hen, M, Munk, D, Katzman, M, Priel, M, Taragin, S & Zadok, A 2020, Surface-acoustic-wave characterization of thin layer deposition on a standard silicon-photonic circuit. in CLEO: Science and Innovations, CLEO_SI 2020., STh1R.3, Optics InfoBase Conference Papers, vol. Part F183-CLEO-SI 2020, Optica Publishing Group (formerly OSA), CLEO: Science and Innovations, CLEO_SI 2020, Washington, United States, 10/05/20. https://doi.org/10.1364/cleo_si.2020.sth1r.3

Surface-acoustic-wave characterization of thin layer deposition on a standard silicon-photonic circuit. / Hen, Mirit; Munk, Dvir; Katzman, Moshe et al.
CLEO: Science and Innovations, CLEO_SI 2020. Optica Publishing Group (formerly OSA), 2020. STh1R.3 (Optics InfoBase Conference Papers; Vol. Part F183-CLEO-SI 2020).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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Surface-acoustic-wave characterization of thin layer deposition on a standard silicon-photonic circuit

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Bibliographical note

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