Surface-Acoustic-Wave Characterization of Thin Layer Deposition on a Standard Silicon-Photonic Circuit

Mirit Hen; Dvir Munk; Moshe Katzman; Maayan Priel; Sarah Taragin; Avi Zadok

Surface-Acoustic-Wave Characterization of Thin Layer Deposition on a Standard Silicon-Photonic Circuit

Mirit Hen, Dvir Munk, Moshe Katzman, Maayan Priel, Sarah Taragin, Avi Zadok

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

2 Scopus citations

Abstract

A thin layer of alumina is characterized using a surface acoustic wave photonic circuit in standard silicon on insulator. Small changes in acoustic velocity are identified by an integrated microwave photonic filter, through acoustic delays.

Original language	English
Title of host publication	2020 Conference on Lasers and Electro-Optics, CLEO 2020 - Proceedings
Publisher	Institute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)	9781943580767
State	Published - May 2020
Event	2020 Conference on Lasers and Electro-Optics, CLEO 2020 - San Jose, United States Duration: 10 May 2020 → 15 May 2020

Publication series

Name	Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS
Volume	2020-May
ISSN (Print)	1092-8081

Conference

Conference	2020 Conference on Lasers and Electro-Optics, CLEO 2020
Country/Territory	United States
City	San Jose
Period	10/05/20 → 15/05/20

Bibliographical note

Publisher Copyright:
© 2020 OSA.

Cite this

Hen, M., Munk, D., Katzman, M., Priel, M., Taragin, S., & Zadok, A. (2020). Surface-Acoustic-Wave Characterization of Thin Layer Deposition on a Standard Silicon-Photonic Circuit. In 2020 Conference on Lasers and Electro-Optics, CLEO 2020 - Proceedings Article 9192926 (Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS; Vol. 2020-May). Institute of Electrical and Electronics Engineers Inc..

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abstract = "A thin layer of alumina is characterized using a surface acoustic wave photonic circuit in standard silicon on insulator. Small changes in acoustic velocity are identified by an integrated microwave photonic filter, through acoustic delays.",

author = "Mirit Hen and Dvir Munk and Moshe Katzman and Maayan Priel and Sarah Taragin and Avi Zadok",

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Hen, M, Munk, D, Katzman, M, Priel, M, Taragin, S & Zadok, A 2020, Surface-Acoustic-Wave Characterization of Thin Layer Deposition on a Standard Silicon-Photonic Circuit. in 2020 Conference on Lasers and Electro-Optics, CLEO 2020 - Proceedings., 9192926, Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS, vol. 2020-May, Institute of Electrical and Electronics Engineers Inc., 2020 Conference on Lasers and Electro-Optics, CLEO 2020, San Jose, United States, 10/05/20.

Surface-Acoustic-Wave Characterization of Thin Layer Deposition on a Standard Silicon-Photonic Circuit. / Hen, Mirit; Munk, Dvir; Katzman, Moshe et al.
2020 Conference on Lasers and Electro-Optics, CLEO 2020 - Proceedings. Institute of Electrical and Electronics Engineers Inc., 2020. 9192926 (Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS; Vol. 2020-May).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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AU - Zadok, Avi

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Hen M, Munk D, Katzman M, Priel M, Taragin S, Zadok A. Surface-Acoustic-Wave Characterization of Thin Layer Deposition on a Standard Silicon-Photonic Circuit. In 2020 Conference on Lasers and Electro-Optics, CLEO 2020 - Proceedings. Institute of Electrical and Electronics Engineers Inc. 2020. 9192926. (Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS).

Surface-Acoustic-Wave Characterization of Thin Layer Deposition on a Standard Silicon-Photonic Circuit

Abstract

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