Superresolved imaging of microelectronic devices for improved failure analysis

Keyphrases

• Failure Analysis 100%
• Microelectronics 100%
• High-resolution 50%
• Region of Interest 50%
• Low Contrast 50%
• Resolution Improvement 50%
• Resolving Power 50%
• Captured Images 50%
• Microelectronic chip 50%

Engineering

• Microelectronics 100%
• Failure Analysis 100%
• Low Resolution Image 50%
• Numerical Approach 50%
• Captured Image 50%
• Region of Interest 50%
• High Resolution 50%

Earth and Planetary Sciences

• Failure Analysis 100%