Superresolved imaging of microelectronic devices for improved failure analysis

Eran Gur; Yoav Weizman; Zeev Zalevsky

doi:10.1109/tdmr.2008.2012056

Superresolved imaging of microelectronic devices for improved failure analysis

Eran Gur, Yoav Weizman, Zeev Zalevsky

Research output: Contribution to journal › Article › peer-review

3 Scopus citations

Abstract

In this paper, we present a new numerical approach for improving the resolving power of low-resolution (LR) images. This approach may be applied for failure analysis of microelectronic chips. The resolution improvement is based upon numerical iterative comparison between a LR experimentally captured image and a high-resolution layout image of the same region of interest.

Original language	English
Article number	4785211
Pages (from-to)	209-214
Number of pages	6
Journal	IEEE Transactions on Device and Materials Reliability
Volume	9
Issue number	2
DOIs	https://doi.org/10.1109/tdmr.2008.2012056
State	Published - Jun 2009

Keywords

Circuit analysis
Failure analysis
Image processing
Image resolution

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10.1109/tdmr.2008.2012056

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title = "Superresolved imaging of microelectronic devices for improved failure analysis",

abstract = "In this paper, we present a new numerical approach for improving the resolving power of low-resolution (LR) images. This approach may be applied for failure analysis of microelectronic chips. The resolution improvement is based upon numerical iterative comparison between a LR experimentally captured image and a high-resolution layout image of the same region of interest.",

keywords = "Circuit analysis, Failure analysis, Image processing, Image resolution",

author = "Eran Gur and Yoav Weizman and Zeev Zalevsky",

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AB - In this paper, we present a new numerical approach for improving the resolving power of low-resolution (LR) images. This approach may be applied for failure analysis of microelectronic chips. The resolution improvement is based upon numerical iterative comparison between a LR experimentally captured image and a high-resolution layout image of the same region of interest.

KW - Circuit analysis

KW - Failure analysis

KW - Image processing

KW - Image resolution

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Superresolved imaging of microelectronic devices for improved failure analysis

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Keywords

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