Keyphrases
Low Temperature
100%
Low Pressure
100%
Chemical Vapor Deposition
100%
Diamond Film
100%
Compressive Stress
100%
Electron Cyclotron Resonance
100%
Grain Boundary
66%
Diamond
66%
Crystal Quality
66%
Net Stress
66%
Si (100) Substrate
33%
Scanning Electron Microscopy
33%
Raman Spectroscopy
33%
X Ray Diffraction
33%
Strong Correlation
33%
X-ray Analysis
33%
Line Shape Analysis
33%
Raman Shift
33%
Relative Amount
33%
Stress Components
33%
Phase Segregation
33%
Residual Stress
33%
Raman Line Shape
33%
Interfacial Stress
33%
Engineering
Low-Temperature
100%
Assisted Chemical Vapor Deposition
100%
Diamond
100%
Cyclotron Resonance
100%
Compressive Stress
75%
Crystalline Quality
50%
Grain Boundary
50%
Ray Diffraction
25%
Raman Lineshape
25%
Phase Segregation
25%
Torr
25%
Stress Component
25%
Diamond Phase
25%
Relative Amount
25%
Residual Stress
25%
Material Science
Film
100%
Chemical Vapor Deposition
100%
Diamond Films
100%
Diamond
50%
Crystalline Material
50%
Grain Boundary
50%
Raman Spectroscopy
25%
X-Ray Diffraction
25%
Scanning Electron Microscopy
25%
Lineshape
25%
Residual Stress
25%
X Ray Analysis
25%