Spatially-Modulated Silicon Interface Energetics Via Hydrogen Plasma-Assisted Atomic Layer Deposition of Ultrathin Alumina

Alex Henning, Johannes D. Bartl, Lukas Wolz, Maximilian Christis, Felix Rauh, Michele Bissolo, Theresa Grünleitner, Johanna Eichhorn, Patrick Zeller, Matteo Amati, Luca Gregoratti, Jonathan J. Finley, Bernhard Rieger, Martin Stutzmann, Ian D. Sharp

Research output: Contribution to journal › Article › peer-review

2 Scopus citations

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Material Science

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Engineering