TY - JOUR
T1 - Spatial phase-shift interferometry - A wavefront analysis technique for three-dimensional topometry
AU - Wolfling, Shay
AU - Lanzmann, Emmanuel
AU - Israeli, Moshe
AU - Ben-Yosef, Nissim
AU - Arieli, Yoel
PY - 2005/11
Y1 - 2005/11
N2 - We describe a new wavefront analysis method, in which certain wavefront manipulations are applied to a spatially defined area in a certain plane along the optical axis. These manipulations replace the reference-beam phase shifting of existing methods, making this method a spatial phase-shift interferometry method. We demonstrate the system's dependence on a defined spatial Airy number, which is the ratio of the characteristic dimension of the manipulated area and the Airy disk diameter of the optical system. We analytically obtain the resulting intensity data of the optical setup and develop various methods to accurately reconstruct the inspected wavefront out of the data. These reconstructions largely involve global techniques, in which the entire wavefront's pattern affects the reconstruction of the wavefront in any given position. The method's noise sensitivity is analyzed, and actual reconstruction results are presented.
AB - We describe a new wavefront analysis method, in which certain wavefront manipulations are applied to a spatially defined area in a certain plane along the optical axis. These manipulations replace the reference-beam phase shifting of existing methods, making this method a spatial phase-shift interferometry method. We demonstrate the system's dependence on a defined spatial Airy number, which is the ratio of the characteristic dimension of the manipulated area and the Airy disk diameter of the optical system. We analytically obtain the resulting intensity data of the optical setup and develop various methods to accurately reconstruct the inspected wavefront out of the data. These reconstructions largely involve global techniques, in which the entire wavefront's pattern affects the reconstruction of the wavefront in any given position. The method's noise sensitivity is analyzed, and actual reconstruction results are presented.
UR - http://www.scopus.com/inward/record.url?scp=28044432143&partnerID=8YFLogxK
U2 - 10.1364/josaa.22.002498
DO - 10.1364/josaa.22.002498
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AN - SCOPUS:28044432143
SN - 1084-7529
VL - 22
SP - 2498
EP - 2509
JO - Journal of the Optical Society of America A: Optics and Image Science, and Vision
JF - Journal of the Optical Society of America A: Optics and Image Science, and Vision
IS - 11
ER -