Soft Lithography for Microfluidic Microelectromechanical Systems (MEMS) and Optical Devices

Svetlana M. Mitrovski, Shraddha Avasthy, Evan M. Erickson, Matthew E. Stewart, John A. Rogers, Ralph G. Nuzzo

Research output: Chapter in Book/Report/Conference proceedingChapterpeer-review

Original languageEnglish
Title of host publicationUnconventional Nanopatterning Techniques and Applications
PublisherJohn Wiley and Sons
Pages293-323
Number of pages31
ISBN (Print)9780470099575
DOIs
StatePublished - 30 Apr 2008

Keywords

  • Concentration gradients and microfluidic devices
  • MEMS and optical device soft lithography
  • Optics and microfluidics

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