Silicon optical phase shifter based on strain induced by a piezoelectric PZT thin film

Y. Sebbag, I. Goykhman, B. Desiatov, T. Nachmias, O. Yoshaei, M. Kabla, S. E. Meltzer, U. Levy

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Scopus citations

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Engineering