Abstract
Silicon doped SnO2 films were synthesized by sputtering SnO2 layer onto glass substrates with appropriate amount of silicon sputtered onto them. The bilayer structures were subjected to rapid thermal annealing for the incorporation of Si in SnO2 matrix. The films thus obtained were characterized by measuring optical and microstructural properties. Liquid petroleum gas (LPG) sensing properties were also investigated. FTIR and Raman studies were also carried out on these films, both, before and after LPG exposure.
| Original language | English |
|---|---|
| Pages (from-to) | 760-770 |
| Number of pages | 11 |
| Journal | Vacuum |
| Volume | 82 |
| Issue number | 8 |
| DOIs | |
| State | Published - 14 Apr 2008 |
| Externally published | Yes |
Bibliographical note
Funding Information:One of us (S.H.) wishes to thank the Director of Indian School of Mines, Dhanbad 826004, India, for his interest in this work. S.N.D. wishes to thank Coal S & T for the award of fellowship to him.
Funding
One of us (S.H.) wishes to thank the Director of Indian School of Mines, Dhanbad 826004, India, for his interest in this work. S.N.D. wishes to thank Coal S & T for the award of fellowship to him.
| Funders | Funder number |
|---|---|
| Coal S & T |
Keywords
- LPG
- Sensor
- SnO