Abstract
In this paper we report the fabrication and characterization of Ag/(Ba,Sr)TiO3 /LaNiO3/LaAlO3 capacitors. All the films, including the top (silver) and bottom (LaNiO3) electrodes, were deposited using a pulsed laser deposition technique. The electrical and dielectric properties of (Ba,Sr)TiO3 capacitors were found to improve significantly by means of silver doping. For example, the leakage current density of a Ag/Ag-doped-(Ba,Sr)TiO3/LaNiO3/capacitor was about an order of magnitude lower and dielectric constant was approx. 40% higher than that of a Ag/(Ba,Sr)TiO3/LaNiO3/capacitor over a range of biases. The improvement in the electrical properties of (Ba,Sr)TiO3 films is believed to be caused by a double role of silver. The first one is associated with the reduced oxygen vacancies due to improved oxygenation of BST films in presence of silver and the second one is associated unpinning effect of domain walls again in presence of silver.
| Original language | English |
|---|---|
| Pages (from-to) | 463-467 |
| Number of pages | 5 |
| Journal | Materials Research Society Symposium - Proceedings |
| Volume | 567 |
| DOIs | |
| State | Published - 1999 |
| Externally published | Yes |
| Event | Proceedings of the 1999 MRS Spring Meeting - Symposium on Ultrathin SiO2 and High-k Materials for ULSI Gate Dielectrics - San Francisco, CA, USA Duration: 5 Apr 1999 → 8 Apr 1999 |