Role of line-beam on the removal of particulate contaminations from solid surfaces by pulsed laser

D. Kumar, Ali Ata, Uday Mahajan, Rajiv K. Singh

Research output: Contribution to journalArticlepeer-review

4 Scopus citations

Abstract

In this paper, we have examined the particulate removal efficiency of a laser from solid surfaces. The silicon wafers were contaminated with 0.05 to 0.5 μm sized alumina particles. The silicon wafers with uniform surface-distribution of alumina particles were subjected to pulsed laser beams at varying conditions. The results obtained have shown that line beam lasers can remove submicron particles more efficiently from solid surfaces. The mechanism responsible for higher particulate removal-efficiency of line beam laser has also been discussed.

Original languageEnglish
Pages (from-to)1104-1106
Number of pages3
JournalJournal of Electronic Materials
Volume27
Issue number10
DOIs
StatePublished - Oct 1998
Externally publishedYes

Funding

The funding for this research was made available from National Science Foundation through the Engi- neering Research Center for Particle Science & Technology at the University of Florida (grant number DE-FG 05-95ER45533). The authors are also thankful to Professor B.M. Moudgil for very helpful discussions.

FundersFunder number
National Science Foundation
University of FloridaDE-FG 05-95ER45533

    Keywords

    • Alumina
    • Line-beam
    • Particulate cleaning
    • Pulsed laser

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