Redistribution and activation of implanted S, Se, Te, Be, Mg, and C in GaN
- R. G. Wilson
- , J. M. Zavada
- , X. A. Cao
- , R. K. Singh
- , S. J. Pearton
- , H. J. Quo
- , S. J. Pennycook
- , M. Fu
- , J. A. Sekhar
- , V. Scarvepalli
- , R. J. Shu
- , J. Han
- , D. J. Rieger
- , J. C. Zolper
- , C. R. Abernathy
- United States Army Research Office
- University of Florida
- Oak Ridge National Laboratory
- Micropyretics Heaters Intl. Inc.
- Sandia National Laboratories
- Office of Naval Research
Research output: Contribution to journal › Article › peer-review
18
Scopus
citations