Realization of submicron-scale square-like silicon waveguide via optimized LOCOS process

Boris Desiatov; Ilya Goykhman; Uriel Levy

Realization of submicron-scale square-like silicon waveguide via optimized LOCOS process

Boris Desiatov, Ilya Goykhman, Uriel Levy

Research output: Contribution to journal › Conference article › peer-review

Abstract

We demonstrate the design, fabrication and experimental characterization of submicron-scale silicon waveguide fabricated by local oxidation of silicon and provide guidelines for controlling its profile. Near field measurements shows submicron confinement of the optical mode.

Original language	English
Journal	Optics InfoBase Conference Papers
State	Published - 2010
Externally published	Yes
Event	Frontiers in Optics, FiO 2010 - Rochester, NY, United States Duration: 24 Oct 2010 → 28 Oct 2010

Cite this

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title = "Realization of submicron-scale square-like silicon waveguide via optimized LOCOS process",

abstract = "We demonstrate the design, fabrication and experimental characterization of submicron-scale silicon waveguide fabricated by local oxidation of silicon and provide guidelines for controlling its profile. Near field measurements shows submicron confinement of the optical mode.",

author = "Boris Desiatov and Ilya Goykhman and Uriel Levy",

year = "2010",

language = "אנגלית",

journal = "Optics InfoBase Conference Papers",

issn = "2162-2701",

note = "Frontiers in Optics, FiO 2010 ; Conference date: 24-10-2010 Through 28-10-2010",

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AU - Desiatov, Boris

AU - Goykhman, Ilya

AU - Levy, Uriel

PY - 2010

Y1 - 2010

N2 - We demonstrate the design, fabrication and experimental characterization of submicron-scale silicon waveguide fabricated by local oxidation of silicon and provide guidelines for controlling its profile. Near field measurements shows submicron confinement of the optical mode.

AB - We demonstrate the design, fabrication and experimental characterization of submicron-scale silicon waveguide fabricated by local oxidation of silicon and provide guidelines for controlling its profile. Near field measurements shows submicron confinement of the optical mode.

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AN - SCOPUS:84897713436

SN - 2162-2701

JO - Optics InfoBase Conference Papers

JF - Optics InfoBase Conference Papers

T2 - Frontiers in Optics, FiO 2010

Y2 - 24 October 2010 through 28 October 2010

ER -

Realization of submicron-scale square-like silicon waveguide via optimized LOCOS process

Abstract

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