Radon-transform-based image enhancement for microelectronic chip inspection

Eran Gur; Yoav Weizman; Philippe Perdu; Zeev Zalevsky

doi:10.1109/TDMR.2010.2056373

Radon-transform-based image enhancement for microelectronic chip inspection

Eran Gur
, Yoav Weizman
, Philippe Perdu
, Zeev Zalevsky

Research output: Contribution to journal › Article › peer-review

6 Scopus citations

Abstract

In this paper, we present a new numerical approach for enhancing the resolving power of low-resolution (LR) images, which can be applied for failure analysis of microelectronic chips. The resolution improvement is based upon a numerical iterative comparison between a Radon transform of a high-resolution layout image and a Radon transform of an LR experimentally captured image of the same region of interest.

Original language	English
Article number	5504072
Pages (from-to)	403-408
Number of pages	6
Journal	IEEE Transactions on Device and Materials Reliability
Volume	10
Issue number	3
DOIs	https://doi.org/10.1109/TDMR.2010.2056373
State	Published - Sep 2010

Keywords

Circuit analysis
Radon transform
failure analysis
image processing
image resolution

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10.1109/TDMR.2010.2056373

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@article{b38f10e6f3014284a75bb4a698d7c856,

title = "Radon-transform-based image enhancement for microelectronic chip inspection",

abstract = "In this paper, we present a new numerical approach for enhancing the resolving power of low-resolution (LR) images, which can be applied for failure analysis of microelectronic chips. The resolution improvement is based upon a numerical iterative comparison between a Radon transform of a high-resolution layout image and a Radon transform of an LR experimentally captured image of the same region of interest.",

keywords = "Circuit analysis, Radon transform, failure analysis, image processing, image resolution",

author = "Eran Gur and Yoav Weizman and Philippe Perdu and Zeev Zalevsky",

year = "2010",

month = sep,

doi = "10.1109/TDMR.2010.2056373",

language = "אנגלית",

volume = "10",

pages = "403--408",

journal = "IEEE Transactions on Device and Materials Reliability",

issn = "1530-4388",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

number = "3",

}

TY - JOUR

T1 - Radon-transform-based image enhancement for microelectronic chip inspection

AU - Gur, Eran

AU - Weizman, Yoav

AU - Perdu, Philippe

AU - Zalevsky, Zeev

PY - 2010/9

Y1 - 2010/9

N2 - In this paper, we present a new numerical approach for enhancing the resolving power of low-resolution (LR) images, which can be applied for failure analysis of microelectronic chips. The resolution improvement is based upon a numerical iterative comparison between a Radon transform of a high-resolution layout image and a Radon transform of an LR experimentally captured image of the same region of interest.

AB - In this paper, we present a new numerical approach for enhancing the resolving power of low-resolution (LR) images, which can be applied for failure analysis of microelectronic chips. The resolution improvement is based upon a numerical iterative comparison between a Radon transform of a high-resolution layout image and a Radon transform of an LR experimentally captured image of the same region of interest.

KW - Circuit analysis

KW - Radon transform

KW - failure analysis

KW - image processing

KW - image resolution

UR - https://www.scopus.com/pages/publications/77956991834

U2 - 10.1109/TDMR.2010.2056373

DO - 10.1109/TDMR.2010.2056373

M3 - ???researchoutput.researchoutputtypes.contributiontojournal.article???

AN - SCOPUS:77956991834

SN - 1530-4388

VL - 10

SP - 403

EP - 408

JO - IEEE Transactions on Device and Materials Reliability

JF - IEEE Transactions on Device and Materials Reliability

IS - 3

M1 - 5504072

ER -

Radon-transform-based image enhancement for microelectronic chip inspection

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Keywords

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