Radon-transform-based image enhancement for microelectronic chip inspection

Eran Gur; Yoav Weizman; Philippe Perdu; Zeev Zalevsky

doi:10.1109/TDMR.2010.2056373

Radon-transform-based image enhancement for microelectronic chip inspection

Eran Gur, Yoav Weizman, Philippe Perdu, Zeev Zalevsky

Research output: Contribution to journal › Article › peer-review

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Abstract

In this paper, we present a new numerical approach for enhancing the resolving power of low-resolution (LR) images, which can be applied for failure analysis of microelectronic chips. The resolution improvement is based upon a numerical iterative comparison between a Radon transform of a high-resolution layout image and a Radon transform of an LR experimentally captured image of the same region of interest.

Original language	English
Article number	5504072
Pages (from-to)	403-408
Number of pages	6
Journal	IEEE Transactions on Device and Materials Reliability
Volume	10
Issue number	3
DOIs	https://doi.org/10.1109/TDMR.2010.2056373
State	Published - Sep 2010

Keywords

Circuit analysis
Radon transform
failure analysis
image processing
image resolution

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10.1109/TDMR.2010.2056373

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Radon-transform-based image enhancement for microelectronic chip inspection

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Keywords

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