Abstract
In this paper, we present a new numerical approach for enhancing the resolving power of low-resolution (LR) images, which can be applied for failure analysis of microelectronic chips. The resolution improvement is based upon a numerical iterative comparison between a Radon transform of a high-resolution layout image and a Radon transform of an LR experimentally captured image of the same region of interest.
Original language | English |
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Article number | 5504072 |
Pages (from-to) | 403-408 |
Number of pages | 6 |
Journal | IEEE Transactions on Device and Materials Reliability |
Volume | 10 |
Issue number | 3 |
DOIs | |
State | Published - Sep 2010 |
Keywords
- Circuit analysis
- Radon transform
- failure analysis
- image processing
- image resolution