Radon-transform-based image enhancement for microelectronic chip inspection

Eran Gur, Yoav Weizman, Philippe Perdu, Zeev Zalevsky

Research output: Contribution to journalArticlepeer-review

6 Scopus citations


In this paper, we present a new numerical approach for enhancing the resolving power of low-resolution (LR) images, which can be applied for failure analysis of microelectronic chips. The resolution improvement is based upon a numerical iterative comparison between a Radon transform of a high-resolution layout image and a Radon transform of an LR experimentally captured image of the same region of interest.

Original languageEnglish
Article number5504072
Pages (from-to)403-408
Number of pages6
JournalIEEE Transactions on Device and Materials Reliability
Issue number3
StatePublished - Sep 2010


  • Circuit analysis
  • Radon transform
  • failure analysis
  • image processing
  • image resolution


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