Quadrature optical interferometry based in-plane displacement measurement of a MEMS grating

  • Manuel J.L.F. Rodrigues
  • , Inês S. Garcia
  • , Zeev Zalevsky
  • , Rosana A. Dias
  • , Filipe S. Alves
  • , Diogo E. Aguiam

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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