Quadrature optical interferometry based in-plane displacement measurement of a MEMS grating

Manuel J.L.F. Rodrigues; Inês S. Garcia; Zeev Zalevsky; Rosana A. Dias; Filipe S. Alves; Diogo E. Aguiam

doi:10.1117/12.3042893

Quadrature optical interferometry based in-plane displacement measurement of a MEMS grating

Manuel J.L.F. Rodrigues, Inês S. Garcia, Zeev Zalevsky, Rosana A. Dias, Filipe S. Alves, Diogo E. Aguiam

International Iberian Nanotechnology Laboratory

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

In this work, we devise an optical interferometry setup to directly measure the in-plane displacement of a microelectromechanical systems (MEMS) optical shutter modulator by using the first diffraction order generated by a grating on its surface. We employ optical homodyne detection and a derivation of a Mach-Zehnder interferometer with a polarization-based quadrature detection architecture to demonstrate nanometric in-plane transient displacement sensitivity at >200 kHz. We present a quadrature grating interferometry method to measure in-plane transient displacement of high-frequency MEMS actuators using a normal incident beam, opening the way for future multi-axis displacement sensing.

Original language	English
Title of host publication	Photonic Instrumentation Engineering XII
Editors	Lynda E. Busse, Yakov Soskind
Publisher	SPIE
ISBN (Electronic)	9781510684942
DOIs	https://doi.org/10.1117/12.3042893
State	Published - 2025
Event	Photonic Instrumentation Engineering XII 2025 - San Francisco, United States Duration: 27 Jan 2025 → 30 Jan 2025

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Volume	13373
ISSN (Print)	0277-786X
ISSN (Electronic)	1996-756X

Conference

Conference	Photonic Instrumentation Engineering XII 2025
Country/Territory	United States
City	San Francisco
Period	27/01/25 → 30/01/25

Bibliographical note

Publisher Copyright:
© 2025 SPIE.

Keywords

homodyne detection
in-plane displacement
Quadrature interferometry

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10.1117/12.3042893

Cite this

Rodrigues, M. J. L. F., Garcia, I. S., Zalevsky, Z., Dias, R. A., Alves, F. S., & Aguiam, D. E. (2025). Quadrature optical interferometry based in-plane displacement measurement of a MEMS grating. In L. E. Busse, & Y. Soskind (Eds.), Photonic Instrumentation Engineering XII Article 1337305 (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 13373). SPIE. https://doi.org/10.1117/12.3042893

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abstract = "In this work, we devise an optical interferometry setup to directly measure the in-plane displacement of a microelectromechanical systems (MEMS) optical shutter modulator by using the first diffraction order generated by a grating on its surface. We employ optical homodyne detection and a derivation of a Mach-Zehnder interferometer with a polarization-based quadrature detection architecture to demonstrate nanometric in-plane transient displacement sensitivity at >200 kHz. We present a quadrature grating interferometry method to measure in-plane transient displacement of high-frequency MEMS actuators using a normal incident beam, opening the way for future multi-axis displacement sensing.",

keywords = "homodyne detection, in-plane displacement, Quadrature interferometry",

author = "Rodrigues, {Manuel J.L.F.} and Garcia, {In{\^e}s S.} and Zeev Zalevsky and Dias, {Rosana A.} and Alves, {Filipe S.} and Aguiam, {Diogo E.}",

note = "Publisher Copyright: {\textcopyright} 2025 SPIE.; Photonic Instrumentation Engineering XII 2025 ; Conference date: 27-01-2025 Through 30-01-2025",

year = "2025",

doi = "10.1117/12.3042893",

language = "אנגלית",

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Rodrigues, MJLF, Garcia, IS, Zalevsky, Z, Dias, RA, Alves, FS & Aguiam, DE 2025, Quadrature optical interferometry based in-plane displacement measurement of a MEMS grating. in LE Busse & Y Soskind (eds), Photonic Instrumentation Engineering XII., 1337305, Proceedings of SPIE - The International Society for Optical Engineering, vol. 13373, SPIE, Photonic Instrumentation Engineering XII 2025, San Francisco, United States, 27/01/25. https://doi.org/10.1117/12.3042893

Quadrature optical interferometry based in-plane displacement measurement of a MEMS grating. / Rodrigues, Manuel J.L.F.; Garcia, Inês S.; Zalevsky, Zeev et al.
Photonic Instrumentation Engineering XII. ed. / Lynda E. Busse; Yakov Soskind. SPIE, 2025. 1337305 (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 13373).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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Quadrature optical interferometry based in-plane displacement measurement of a MEMS grating

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