Abstract
The pyrolysis of siloxy-anchored, organic self-assembled monolayers (SAMs) on oxide substrates [titanium dioxide powder; hydrolyzed silicon dioxide on (100) silicon] was studied using x-ray photoelectron spectroscopy (XPS), thermogravimetric analysis (TGA), and mass spectroscopy (MS). Pyrolysis in air began on heating at 200°C and was complete by 400°C for both octadecyltrichlorosilane (OTS) and C16-thioacetate (TA) SAMs, as observed in TGA of SAM-coated TiO2 powders, and in XPS studies of TA-SAM-coated TiO2 powders and Si wafers after various heat treatments. In low-oxygen environments, pyrolysis of SAMs began at higher temperatures: between 250 and 400°C for heating in ultrahigh vacuum (10-8 Torr) as observed in XPS studies of TA-SAMs on Si, and between 300 and 400°C in nitrogen, as observed in TEM analysis of sulfonate SAMs under a TiO2 thin film on Si substrates.
Original language | English |
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Pages (from-to) | 2116-2123 |
Number of pages | 8 |
Journal | Journal of Materials Research |
Volume | 14 |
Issue number | 5 |
DOIs | |
State | Published - May 1999 |
Bibliographical note
Funding Information:The authors thank Dr. R. J. Collins for her helpful discussions and for assistance with synthesis of the organic silanes. We also thank Professor P. K. Gallagher at The Ohio State University Dept. of Chemistry for carrying out the thermogravimetric analysis and Dr. H. Kahn of CWRU for assistance with the heat treatments in vacuum. Professor M. Rühle of the Max-Plank Insti-tut für Metallforschung in Stuttgart, Germany provided valuable insight regarding contrast in TEM images. During part of this research, H. Shin was an Alexander von Humboldt Junior Fellow and M. R. De Guire was a visiting scientist at the Max-Plank Institut für Metallforschung in Stuttgart, Germany, which support is gratefully acknowledged. Financial support was provided by AFOSR under Contract No. F49620-92J-0282 and by the Basic Missile Defense Office through an STTR Award to Solid State Scientific Corporation. C. N. Sukenik acknowledges the support of the Israel Ministry of Science.
Funding
The authors thank Dr. R. J. Collins for her helpful discussions and for assistance with synthesis of the organic silanes. We also thank Professor P. K. Gallagher at The Ohio State University Dept. of Chemistry for carrying out the thermogravimetric analysis and Dr. H. Kahn of CWRU for assistance with the heat treatments in vacuum. Professor M. Rühle of the Max-Plank Insti-tut für Metallforschung in Stuttgart, Germany provided valuable insight regarding contrast in TEM images. During part of this research, H. Shin was an Alexander von Humboldt Junior Fellow and M. R. De Guire was a visiting scientist at the Max-Plank Institut für Metallforschung in Stuttgart, Germany, which support is gratefully acknowledged. Financial support was provided by AFOSR under Contract No. F49620-92J-0282 and by the Basic Missile Defense Office through an STTR Award to Solid State Scientific Corporation. C. N. Sukenik acknowledges the support of the Israel Ministry of Science.
Funders | Funder number |
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Basic Missile Defense Office | |
Air Force Office of Scientific Research | F49620-92J-0282 |
Ministry of science and technology, Israel |