Pulsed laser assisted particulate cleaning of solid surfaces

D. Kumar, S. Ivory, U. Mahajan, Rajiv K. Singh

Research output: Contribution to journalConference articlepeer-review

2 Scopus citations


In the this paper, we have examined the particulate removal efficiency of laser from solid surfaces. The silicon wafers were contaminated with alumina particles with sizes ranging from 0.05 μm to 0.5 μm. The silicon wafers with uniform surface-distribution of alumina particles were subjected to pulsed laser beams at varying conditions. The results obtained have shown that line beam lasers can remove submicron particles more efficiently from solid surfaces. The mechanism responsible for higher particulate removal-efficiency of line beam laser has also been discussed.

Original languageEnglish
Pages (from-to)475-479
Number of pages5
JournalMaterials Research Society Symposium - Proceedings
StatePublished - 1997
Externally publishedYes
EventProceedings of the 1997 MRS Spring Meeting - San Francisco, CA, USA
Duration: 31 Mar 1997 → …


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