Abstract
In the this paper, we have examined the particulate removal efficiency of laser from solid surfaces. The silicon wafers were contaminated with alumina particles with sizes ranging from 0.05 μm to 0.5 μm. The silicon wafers with uniform surface-distribution of alumina particles were subjected to pulsed laser beams at varying conditions. The results obtained have shown that line beam lasers can remove submicron particles more efficiently from solid surfaces. The mechanism responsible for higher particulate removal-efficiency of line beam laser has also been discussed.
Original language | English |
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Pages (from-to) | 475-479 |
Number of pages | 5 |
Journal | Materials Research Society Symposium - Proceedings |
Volume | 477 |
State | Published - 1997 |
Externally published | Yes |
Event | Proceedings of the 1997 MRS Spring Meeting - San Francisco, CA, USA Duration: 31 Mar 1997 → … |