Planar hall effect sensors with subnanotesla resolution

A. Grosz; V. Mor; E. Paperno; S. Amrusi; I. Faivinov; M. Schultz; L. Klein

doi:10.1109/lmag.2013.2276551

Planar hall effect sensors with subnanotesla resolution

A. Grosz
, V. Mor
, E. Paperno
, S. Amrusi
, I. Faivinov
, M. Schultz
, L. Klein

Department of Physics - at Bar-Ilan University

Ben-Gurion University of the Negev

Research output: Contribution to journal › Article › peer-review

35 Scopus citations

Abstract

We report the fabrication of elliptical planar Hall effect sensors made of Permalloy with response determined by shape-induced uniaxial anisotropy. By using ac excitation and by optimizing the sensor thickness and the amplitude of the excitation current, we have obtained a magnetic field resolution which is better than 600 pT/√Hz at 1 Hz and close to 1 nT/√Hz at 0.1 Hz. We discuss possible routes for further improvement of the obtained resolution.

Original language	English
Article number	6587129
Journal	IEEE Magnetics Letters
Volume	4
DOIs	https://doi.org/10.1109/lmag.2013.2276551
State	Published - 2013

Keywords

Magnetic instruments
Magnetic sensors
Planar Hall effect
Resolution
Sensor
subnanotesla

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10.1109/lmag.2013.2276551

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title = "Planar hall effect sensors with subnanotesla resolution",

abstract = "We report the fabrication of elliptical planar Hall effect sensors made of Permalloy with response determined by shape-induced uniaxial anisotropy. By using ac excitation and by optimizing the sensor thickness and the amplitude of the excitation current, we have obtained a magnetic field resolution which is better than 600 pT/√Hz at 1 Hz and close to 1 nT/√Hz at 0.1 Hz. We discuss possible routes for further improvement of the obtained resolution.",

keywords = "Magnetic instruments, Magnetic sensors, Planar Hall effect, Resolution, Sensor, subnanotesla",

author = "A. Grosz and V. Mor and E. Paperno and S. Amrusi and I. Faivinov and M. Schultz and L. Klein",

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AU - Grosz, A.

AU - Mor, V.

AU - Paperno, E.

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AU - Faivinov, I.

AU - Schultz, M.

AU - Klein, L.

PY - 2013

Y1 - 2013

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AB - We report the fabrication of elliptical planar Hall effect sensors made of Permalloy with response determined by shape-induced uniaxial anisotropy. By using ac excitation and by optimizing the sensor thickness and the amplitude of the excitation current, we have obtained a magnetic field resolution which is better than 600 pT/√Hz at 1 Hz and close to 1 nT/√Hz at 0.1 Hz. We discuss possible routes for further improvement of the obtained resolution.

KW - Magnetic instruments

KW - Magnetic sensors

KW - Planar Hall effect

KW - Resolution

KW - Sensor

KW - subnanotesla

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SN - 1949-307X

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JO - IEEE Magnetics Letters

JF - IEEE Magnetics Letters

M1 - 6587129

ER -

Planar hall effect sensors with subnanotesla resolution

Abstract

Keywords

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