Planar hall effect sensors with subnanotesla resolution

A. Grosz, V. Mor, E. Paperno, S. Amrusi, I. Faivinov, M. Schultz, L. Klein

Research output: Contribution to journalArticlepeer-review

30 Scopus citations

Abstract

We report the fabrication of elliptical planar Hall effect sensors made of Permalloy with response determined by shape-induced uniaxial anisotropy. By using ac excitation and by optimizing the sensor thickness and the amplitude of the excitation current, we have obtained a magnetic field resolution which is better than 600 pT/√Hz at 1 Hz and close to 1 nT/√Hz at 0.1 Hz. We discuss possible routes for further improvement of the obtained resolution.

Original languageEnglish
Article number6587129
JournalIEEE Magnetics Letters
Volume4
DOIs
StatePublished - 2013

Keywords

  • Magnetic instruments
  • Magnetic sensors
  • Planar Hall effect
  • Resolution
  • Sensor
  • subnanotesla

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