TY - JOUR
T1 - Planar Hall Effect Magnetometer with 5 pT Resolution
AU - Nhalil, Hariharan
AU - Givon, Tzahi
AU - Das, Proloy Taran
AU - Hasidim, Nir
AU - Mor, Vladislav
AU - Schultz, Moty
AU - Amrusi, Shai
AU - Klein, Lior
AU - Grosz, Asaf
N1 - Publisher Copyright:
© 2017 IEEE.
PY - 2019/12
Y1 - 2019/12
N2 - We integrate elliptical planar Hall effect (PHE) magnetometers with optimized high permeability magnetic flux concentrators. The integrated magnetometers exhibit at room temperature an equivalent magnetic noise of ∼5 pT/√Hz at 10 Hz, 7.4 pT/√Hz at 1 Hz, and better than 100 pT/√Hz at 10 mHz. The results constitute more than an order of magnitude improvement over previously reported state-of-the-art PHE magnetometers, and demonstrate, for the first time, the ability of a magnetoresistive sensor to match the performance of state-of-the-art, high-end flux-gate, and miniature atomic magnetometers.
AB - We integrate elliptical planar Hall effect (PHE) magnetometers with optimized high permeability magnetic flux concentrators. The integrated magnetometers exhibit at room temperature an equivalent magnetic noise of ∼5 pT/√Hz at 10 Hz, 7.4 pT/√Hz at 1 Hz, and better than 100 pT/√Hz at 10 mHz. The results constitute more than an order of magnitude improvement over previously reported state-of-the-art PHE magnetometers, and demonstrate, for the first time, the ability of a magnetoresistive sensor to match the performance of state-of-the-art, high-end flux-gate, and miniature atomic magnetometers.
KW - Magnetic sensors
KW - equivalent magnetic noise (EMN)
KW - magnetometer
KW - planar Hall effect (PHE)
UR - http://www.scopus.com/inward/record.url?scp=85082634423&partnerID=8YFLogxK
U2 - 10.1109/lsens.2019.2947681
DO - 10.1109/lsens.2019.2947681
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SN - 2475-1472
VL - 3
JO - IEEE Sensors Letters
JF - IEEE Sensors Letters
IS - 12
M1 - 8871164
ER -