Abstract
Silicon-photonic devices are tuned by selective photo removal of chalcogenide glass upper claddings. Phase delays in Mach-Zehnder interferometers and coupling ratios of ring resonators are adjusted. The transfer functions of devices remain stable following trimming.
| Original language | English |
|---|---|
| Title of host publication | OMN 2015 Jerusalem - 2015 International Conference on Optical MEMS and Nanophotonics, Proceedings |
| Publisher | IEEE Computer Society |
| ISBN (Electronic) | 9781467368346 |
| DOIs | |
| State | Published - 2 Oct 2015 |
| Event | International Conference on Optical MEMS and Nanophotonics, OMN 2015 - Jerusalem, Israel Duration: 2 Aug 2015 → 5 Aug 2015 |
Publication series
| Name | International Conference on Optical MEMS and Nanophotonics |
|---|---|
| Volume | 02-05-August-2015 |
| ISSN (Print) | 2160-5033 |
| ISSN (Electronic) | 2160-5041 |
Conference
| Conference | International Conference on Optical MEMS and Nanophotonics, OMN 2015 |
|---|---|
| Country/Territory | Israel |
| City | Jerusalem |
| Period | 2/08/15 → 5/08/15 |
Bibliographical note
Publisher Copyright:© 2015 IEEE.
Keywords
- Chalcogenide glass
- Photonic integrated circuits
- Photosensitivity
- Silicon photonics