Photo-induced trimming of chalcogenide-on-silicon photonic integrated circuits

R. Califa, D. Munk, I. Bakish, A. Zadok, H. Genish, Yu Kaganovskii, M. Rosenbluh

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Scopus citations

Abstract

Silicon-photonic devices are tuned by selective photo removal of chalcogenide glass upper claddings. Phase delays in Mach-Zehnder interferometers and coupling ratios of ring resonators are adjusted. The transfer functions of devices remain stable following trimming.

Original languageEnglish
Title of host publicationOMN 2015 Jerusalem - 2015 International Conference on Optical MEMS and Nanophotonics, Proceedings
PublisherIEEE Computer Society
ISBN (Electronic)9781467368346
DOIs
StatePublished - 2 Oct 2015
EventInternational Conference on Optical MEMS and Nanophotonics, OMN 2015 - Jerusalem, Israel
Duration: 2 Aug 20155 Aug 2015

Publication series

NameInternational Conference on Optical MEMS and Nanophotonics
Volume02-05-August-2015
ISSN (Print)2160-5033
ISSN (Electronic)2160-5041

Conference

ConferenceInternational Conference on Optical MEMS and Nanophotonics, OMN 2015
Country/TerritoryIsrael
CityJerusalem
Period2/08/155/08/15

Bibliographical note

Publisher Copyright:
© 2015 IEEE.

Keywords

  • Chalcogenide glass
  • Photonic integrated circuits
  • Photosensitivity
  • Silicon photonics

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