Abstract
Silicon-photonic devices are tuned by selective photo removal of chalcogenide glass upper claddings. Phase delays in Mach-Zehnder interferometers and coupling ratios of ring resonators are adjusted. The transfer functions of devices remain stable following trimming.
Original language | English |
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Title of host publication | OMN 2015 Jerusalem - 2015 International Conference on Optical MEMS and Nanophotonics, Proceedings |
Publisher | IEEE Computer Society |
ISBN (Electronic) | 9781467368346 |
DOIs | |
State | Published - 2 Oct 2015 |
Event | International Conference on Optical MEMS and Nanophotonics, OMN 2015 - Jerusalem, Israel Duration: 2 Aug 2015 → 5 Aug 2015 |
Publication series
Name | International Conference on Optical MEMS and Nanophotonics |
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Volume | 02-05-August-2015 |
ISSN (Print) | 2160-5033 |
ISSN (Electronic) | 2160-5041 |
Conference
Conference | International Conference on Optical MEMS and Nanophotonics, OMN 2015 |
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Country/Territory | Israel |
City | Jerusalem |
Period | 2/08/15 → 5/08/15 |
Bibliographical note
Publisher Copyright:© 2015 IEEE.
Keywords
- Chalcogenide glass
- Photonic integrated circuits
- Photosensitivity
- Silicon photonics