Abstract
In this paper, we present a new approach providing super resolved images exceeding the geometrical limitation given by the detector pixel size of the imaging camera. The concept involves the projection of periodic patterns on top of the sample, which are then investigated under a microscope. Combining spatial scanning together with proper digital post-processing algorithm yields the improved geometrical resolution enhancement. This new method is especially interesting for microscopic imaging when the resolution of the detector is lower than the resolution due to diffraction.
Original language | English |
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Pages (from-to) | 115-120 |
Number of pages | 6 |
Journal | Micron |
Volume | 38 |
Issue number | 2 |
DOIs | |
State | Published - Feb 2007 |
Bibliographical note
Funding Information:Javier Garcia acknowledges the support of the Spanish Ministry of Science and Education and the Ministry of Science and Technology under the codes PR-2004-0543 and FIS2004-06947-C02-01.
Funding
Javier Garcia acknowledges the support of the Spanish Ministry of Science and Education and the Ministry of Science and Technology under the codes PR-2004-0543 and FIS2004-06947-C02-01.
Funders | Funder number |
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Spanish Ministry of Science and Education | |
Ministry of Science and Technology, Taiwan | FIS2004-06947-C02-01, PR-2004-0543 |
Keywords
- Geometrical limitation
- Microscopy