TY - JOUR
T1 - Parallel array of planar Hall effect sensors for high resolution magnetometry
AU - Nhalil, Hariharan
AU - Schultz, Moty
AU - Amrusi, Shai
AU - Grosz, Asaf
AU - Klein, Lior
N1 - Publisher Copyright:
© 2023 Author(s).
PY - 2023/5/28
Y1 - 2023/5/28
N2 - We introduce a planar Hall effect magnetometer in the form of a parallel array of permalloy-based elliptical sensors. The number of ellipses in the array and other fabrication parameters are optimized with the support of numerical simulations. We obtain equivalent magnetic noise (EMN) of 16 pT/Hz at 100 Hz, 25 pT/Hz at 10 Hz, 98 pT/Hz at 1 Hz, and 470 pT/Hz at 0.1 Hz. The exceptional EMN without the use of magnetic flux concentrators highlights the advantages of the design. The presented magnetometer, characterized by its simplicity, affordability, and ability to operate at room temperature, is anticipated to be useful for applications requiring pT resolution.
AB - We introduce a planar Hall effect magnetometer in the form of a parallel array of permalloy-based elliptical sensors. The number of ellipses in the array and other fabrication parameters are optimized with the support of numerical simulations. We obtain equivalent magnetic noise (EMN) of 16 pT/Hz at 100 Hz, 25 pT/Hz at 10 Hz, 98 pT/Hz at 1 Hz, and 470 pT/Hz at 0.1 Hz. The exceptional EMN without the use of magnetic flux concentrators highlights the advantages of the design. The presented magnetometer, characterized by its simplicity, affordability, and ability to operate at room temperature, is anticipated to be useful for applications requiring pT resolution.
UR - http://www.scopus.com/inward/record.url?scp=85160588484&partnerID=8YFLogxK
U2 - 10.1063/5.0151569
DO - 10.1063/5.0151569
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SN - 0021-8979
VL - 133
JO - Journal of Applied Physics
JF - Journal of Applied Physics
IS - 20
M1 - 204501
ER -