Abstract
We demonstrate the design, fabrication, transmission spectrum measurement, and near-field characterization of a parabolic tapered one-dimensional photonic crystal cavity in silicon. The results shows a relatively high quality factor (∼43 000), together with a small modal volume of ∼ 1. 1 (λ/n) 3. Moreover, the design allows repeatable device fabrication, as evident by the similar characteristics obtained for several tens of devices that were fabricated and tested. These demonstrated 1D PhC cavities may be used as a building block in integrated photonic circuits for optical on-chip interconnects and sensing applications.
Original language | English |
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Article number | 041112 |
Journal | Applied Physics Letters |
Volume | 100 |
Issue number | 4 |
DOIs | |
State | Published - 23 Jan 2012 |
Externally published | Yes |
Bibliographical note
Funding Information:The authors acknowledge technical support from David Shlosberg and Noa Mazursky. The research was supported in parts by the U.S-Israel binational science foundation, and the Israeli Science Foundation. Boris Desiatov and Ilya Goykhman acknowledge the Eshkol fellowship from the Israeli Ministry of Science and Technology. The devices were fabricated at the Center for Nanoscience and Nanotechnology, The Hebrew University of Jerusalem.
Funding
The authors acknowledge technical support from David Shlosberg and Noa Mazursky. The research was supported in parts by the U.S-Israel binational science foundation, and the Israeli Science Foundation. Boris Desiatov and Ilya Goykhman acknowledge the Eshkol fellowship from the Israeli Ministry of Science and Technology. The devices were fabricated at the Center for Nanoscience and Nanotechnology, The Hebrew University of Jerusalem.
Funders | Funder number |
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United States-Israel Binational Science Foundation | |
Israel Science Foundation | |
Ministry of science and technology, Israel |