Optical waveguide on silicon made by zone melting method

Uriel Hanuka; Yair Zigman; Maor Tiferet; Zeev Zalevsky; Moshe Sinvani

doi:10.1117/12.2545949

Optical waveguide on silicon made by zone melting method

Uriel Hanuka, Yair Zigman, Maor Tiferet, Zeev Zalevsky, Moshe Sinvani

Bar-Ilan University - The Alexander Kofkin Faculty of Engineering

Bar-Ilan University

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

In this paper we introduce a novel method of making micro-waveguides on silicon surface by the use of the Zone Refining Method. We produce the melting zone by a laser beam focused on the surface of a doped silicon slab to create a melting spot on its surface. By moving the melt zone across the silicon sample we can write a path of higher index of refraction on the silicon. The depth and the width of the waveguide can be determined by the wavelength and the spot diameter of the laser, respectively. We demonstrate the production of 1X4 μm² channel on the silicon, by using 532 nm laser beam. This method can be applied in microelectronics for the manufacture of light waveguides on integrated optoelectronics ICs.

Original language	English
Title of host publication	Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXV
Editors	Gediminas Raciukaitis, Carlos Molpeceres, Jie Qiao, Aiko Narazaki
Publisher	SPIE
ISBN (Electronic)	9781510632974
DOIs	https://doi.org/10.1117/12.2545949
State	Published - 2020
Event	Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXV 2020 - San Francisco, United States Duration: 3 Feb 2020 → 5 Feb 2020

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Volume	11267
ISSN (Print)	0277-786X
ISSN (Electronic)	1996-756X

Conference

Conference	Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXV 2020
Country/Territory	United States
City	San Francisco
Period	3/02/20 → 5/02/20

Bibliographical note

Publisher Copyright:
© 2020 SPIE.

Keywords

Impurities
Micro-waveguides
Plasma dispersion
Silicon
Zone refining

Access to Document

10.1117/12.2545949

Cite this

Hanuka, U., Zigman, Y., Tiferet, M., Zalevsky, Z., & Sinvani, M. (2020). Optical waveguide on silicon made by zone melting method. In G. Raciukaitis, C. Molpeceres, J. Qiao, & A. Narazaki (Eds.), Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXV Article 1126706 (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 11267). SPIE. https://doi.org/10.1117/12.2545949

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abstract = "In this paper we introduce a novel method of making micro-waveguides on silicon surface by the use of the Zone Refining Method. We produce the melting zone by a laser beam focused on the surface of a doped silicon slab to create a melting spot on its surface. By moving the melt zone across the silicon sample we can write a path of higher index of refraction on the silicon. The depth and the width of the waveguide can be determined by the wavelength and the spot diameter of the laser, respectively. We demonstrate the production of 1X4 μm2 channel on the silicon, by using 532 nm laser beam. This method can be applied in microelectronics for the manufacture of light waveguides on integrated optoelectronics ICs.",

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Hanuka, U, Zigman, Y, Tiferet, M, Zalevsky, Z & Sinvani, M 2020, Optical waveguide on silicon made by zone melting method. in G Raciukaitis, C Molpeceres, J Qiao & A Narazaki (eds), Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXV., 1126706, Proceedings of SPIE - The International Society for Optical Engineering, vol. 11267, SPIE, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXV 2020, San Francisco, United States, 3/02/20. https://doi.org/10.1117/12.2545949

Optical waveguide on silicon made by zone melting method. / Hanuka, Uriel; Zigman, Yair; Tiferet, Maor et al.
Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXV. ed. / Gediminas Raciukaitis; Carlos Molpeceres; Jie Qiao; Aiko Narazaki. SPIE, 2020. 1126706 (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 11267).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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N2 - In this paper we introduce a novel method of making micro-waveguides on silicon surface by the use of the Zone Refining Method. We produce the melting zone by a laser beam focused on the surface of a doped silicon slab to create a melting spot on its surface. By moving the melt zone across the silicon sample we can write a path of higher index of refraction on the silicon. The depth and the width of the waveguide can be determined by the wavelength and the spot diameter of the laser, respectively. We demonstrate the production of 1X4 μm2 channel on the silicon, by using 532 nm laser beam. This method can be applied in microelectronics for the manufacture of light waveguides on integrated optoelectronics ICs.

AB - In this paper we introduce a novel method of making micro-waveguides on silicon surface by the use of the Zone Refining Method. We produce the melting zone by a laser beam focused on the surface of a doped silicon slab to create a melting spot on its surface. By moving the melt zone across the silicon sample we can write a path of higher index of refraction on the silicon. The depth and the width of the waveguide can be determined by the wavelength and the spot diameter of the laser, respectively. We demonstrate the production of 1X4 μm2 channel on the silicon, by using 532 nm laser beam. This method can be applied in microelectronics for the manufacture of light waveguides on integrated optoelectronics ICs.

KW - Impurities

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KW - Plasma dispersion

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Hanuka U, Zigman Y, Tiferet M, Zalevsky Z, Sinvani M. Optical waveguide on silicon made by zone melting method. In Raciukaitis G, Molpeceres C, Qiao J, Narazaki A, editors, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXV. SPIE. 2020. 1126706. (Proceedings of SPIE - The International Society for Optical Engineering). doi: 10.1117/12.2545949

Optical waveguide on silicon made by zone melting method

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Keywords

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