Novel vapor phase method for making ultra thin conformal films of polytetrafluoroethylene (PTFE)

Sushant Gupta; Arul Arjunan Chakkaravarthi; Rajiv Singh; Jeff Opalko; Deepika Singh

doi:10.1557/proc-0992-d04-03

Novel vapor phase method for making ultra thin conformal films of polytetrafluoroethylene (PTFE)

Sushant Gupta, Arul Arjunan Chakkaravarthi, Rajiv Singh, Jeff Opalko, Deepika Singh

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

Ultra-thin conformal polytetrafluoroethylene (PTFE) films were prepared by a novel physical vapor technique i.e., pulsed electron deposition (PED) technique. Prepared PTFE or Teflon thin films show high degree of conformity on patterned substrates. Under optimized deposition conditions the films exhibit superhydrophobicity. The PED processed films were characterized using scanning electron microscopy (SEM) and atomic force microscopy (AFM) micrographs and the surface morphology and the conformal nature of the films were studied. The chemical nature and hydrophobicity were studied by FTIR and contact angle measurements, respectively.

Original language	English
Title of host publication	Materials Research Society Symposium Proceedings - Deposition on Nonplanar Substrates
Publisher	Materials Research Society
Pages	19-24
Number of pages	6
ISBN (Print)	9781605604220
DOIs	https://doi.org/10.1557/proc-0992-d04-03
State	Published - 2007
Externally published	Yes
Event	Deposition on Nonplanar Substrates - 2007 MRS Spring Meeting - San Francisco, CA, United States Duration: 9 Apr 2007 → 13 Apr 2007

Publication series

Name	Materials Research Society Symposium Proceedings
Volume	992
ISSN (Print)	0272-9172

Conference

Conference	Deposition on Nonplanar Substrates - 2007 MRS Spring Meeting
Country/Territory	United States
City	San Francisco, CA
Period	9/04/07 → 13/04/07

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10.1557/proc-0992-d04-03

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Gupta, S., Chakkaravarthi, A. A., Singh, R., Opalko, J., & Singh, D. (2007). Novel vapor phase method for making ultra thin conformal films of polytetrafluoroethylene (PTFE). In Materials Research Society Symposium Proceedings - Deposition on Nonplanar Substrates (pp. 19-24). (Materials Research Society Symposium Proceedings; Vol. 992). Materials Research Society. https://doi.org/10.1557/proc-0992-d04-03

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title = "Novel vapor phase method for making ultra thin conformal films of polytetrafluoroethylene (PTFE)",

abstract = "Ultra-thin conformal polytetrafluoroethylene (PTFE) films were prepared by a novel physical vapor technique i.e., pulsed electron deposition (PED) technique. Prepared PTFE or Teflon thin films show high degree of conformity on patterned substrates. Under optimized deposition conditions the films exhibit superhydrophobicity. The PED processed films were characterized using scanning electron microscopy (SEM) and atomic force microscopy (AFM) micrographs and the surface morphology and the conformal nature of the films were studied. The chemical nature and hydrophobicity were studied by FTIR and contact angle measurements, respectively.",

author = "Sushant Gupta and Chakkaravarthi, {Arul Arjunan} and Rajiv Singh and Jeff Opalko and Deepika Singh",

year = "2007",

doi = "10.1557/proc-0992-d04-03",

language = "אנגלית",

isbn = "9781605604220",

series = "Materials Research Society Symposium Proceedings",

publisher = "Materials Research Society",

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booktitle = "Materials Research Society Symposium Proceedings - Deposition on Nonplanar Substrates",

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note = "Deposition on Nonplanar Substrates - 2007 MRS Spring Meeting ; Conference date: 09-04-2007 Through 13-04-2007",

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Gupta, S, Chakkaravarthi, AA, Singh, R, Opalko, J & Singh, D 2007, Novel vapor phase method for making ultra thin conformal films of polytetrafluoroethylene (PTFE). in Materials Research Society Symposium Proceedings - Deposition on Nonplanar Substrates. Materials Research Society Symposium Proceedings, vol. 992, Materials Research Society, pp. 19-24, Deposition on Nonplanar Substrates - 2007 MRS Spring Meeting, San Francisco, CA, United States, 9/04/07. https://doi.org/10.1557/proc-0992-d04-03

Novel vapor phase method for making ultra thin conformal films of polytetrafluoroethylene (PTFE). / Gupta, Sushant; Chakkaravarthi, Arul Arjunan; Singh, Rajiv et al.
Materials Research Society Symposium Proceedings - Deposition on Nonplanar Substrates. Materials Research Society, 2007. p. 19-24 (Materials Research Society Symposium Proceedings; Vol. 992).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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Novel vapor phase method for making ultra thin conformal films of polytetrafluoroethylene (PTFE)

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