@inproceedings{e821a509e57b48e584b717b28240c443,
title = "Novel method to synthesize ceria coated silica particles",
abstract = "Monodispersed ceria coated silica particles were prepared by a new type of ceria precursor. The ceria precursor was synthesized by alkoxide method, which employs ethanol as solvent. The synthesized particles were characterized with scanning electron microscopy (SEM), transmission electron microscopy (TEM), X-ray diffraction (XRD) and X-ray photoelectron spectroscopy (XPS). It was found that well-crystalline ceria coatings were deposited on the surface of the silica particles without post-heat treatment. In addition, the coated particles prepared by a new precursor were uniformly dispersed without the formation of hard aggregate as compared to those obtained by conventional method.",
author = "Oh, {Myoung Hwan} and Lee, {Jae Seok} and Sushant Gupta and Kim, {Tae Gon} and Aniroddh Kaanna and Singh, {Rajiv K.}",
year = "2010",
language = "אנגלית",
isbn = "9781605111308",
series = "Materials Research Society Symposium Proceedings",
pages = "109--113",
booktitle = "Science and Technology of Chemical Mechanical Planarization (CMP)",
note = "2009 MRS Spring Meeting ; Conference date: 14-04-2009 Through 17-04-2009",
}