Novel in situ production of smooth diamond films

Keyphrases

• As-deposited 20%
• Average Roughness 20%
• Diamond Film 100%
• Electron Cyclotron Resonance Plasma 20%
• Extraction Methods 20%
• Gas Mixture 20%
• In Situ Deposition 20%
• In Situ Production 100%
• Ion Beam Extraction 20%
• Methanol 20%
• Microwave Plasma 20%
• Oxygen Plasma 20%
• Planarization 40%
• Plasma Process 20%
• Plasma System 20%
• Process Systems 20%
• Pure Oxygen 20%
• Two-grid 20%

Engineering

• Cyclotron Resonance 20%
• Diamond 100%
• Extraction Process 20%
• Gas Mixture 20%
• Microwave Plasma 20%
• Planarization 40%
• Plasma Process 20%
• Plasma System 20%
• Process System 20%
• Pure Oxygen 20%
• Torr 20%

Earth and Planetary Sciences

• Cyclotron Resonance 20%
• Diamond Films 100%
• Gas Mixture 20%
• Ion Beam 20%
• Methyl Alcohol 20%
• Oxygen Plasma 20%
• Plasma Process 20%