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Novel in situ production of smooth diamond films
Donald R. Gilbert
, Dong Gu Lee
, Rajiv K. Singh
University of Florida
Research output
:
Contribution to journal
›
Article
›
peer-review
13
Scopus citations
Overview
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Keyphrases
In Situ Production
100%
Diamond Film
100%
Planarization
40%
Methanol
20%
Extraction Methods
20%
Gas Mixture
20%
Oxygen Plasma
20%
As-deposited
20%
Microwave Plasma
20%
In Situ Deposition
20%
Two-grid
20%
Plasma Process
20%
Electron Cyclotron Resonance Plasma
20%
Plasma System
20%
Process Systems
20%
Pure Oxygen
20%
Average Roughness
20%
Ion Beam Extraction
20%
Engineering
Diamond
100%
Planarization
40%
Process System
20%
Microwave Plasma
20%
Torr
20%
Plasma System
20%
Pure Oxygen
20%
Extraction Process
20%
Cyclotron Resonance
20%
Gas Mixture
20%
Plasma Process
20%
Earth and Planetary Sciences
Diamond Films
100%
Methyl Alcohol
20%
Ion Beam
20%
Gas Mixture
20%
Cyclotron Resonance
20%
Oxygen Plasma
20%
Plasma Process
20%