TY - JOUR
T1 - Niobium Nitride Thin Films for Very Low Temperature Resistive Thermometry
AU - Nguyen, Tuyen
AU - Tavakoli, Adib
AU - Triqueneaux, Sebastien
AU - Swami, Rahul
AU - Ruhtinas, Aki
AU - Gradel, Jeremy
AU - Garcia-Campos, Pablo
AU - Hasselbach, Klaus
AU - Frydman, Aviad
AU - Piot, Benjamin
AU - Gibert, Mathieu
AU - Collin, Eddy
AU - Bourgeois, Olivier
N1 - Publisher Copyright:
© 2019, Springer Science+Business Media, LLC, part of Springer Nature.
PY - 2019/12/1
Y1 - 2019/12/1
N2 - We investigate thin-film resistive thermometry based on metal-to-insulator transition (niobium nitride) materials down to very low temperature. The variation of the NbN thermometer resistance has been calibrated versus temperature and magnetic field. High sensitivity in temperature variation detection is demonstrated through efficient temperature coefficient of resistance. The nitrogen content of the niobium nitride thin films can be tuned to adjust the optimal working temperature range. In the present experiment, we show the versatility of the NbN thin-film technology through applications in very different low-temperature use cases. We demonstrate that thin-film resistive thermometry can be extended to temperatures below 30 mK with low electrical impedance.
AB - We investigate thin-film resistive thermometry based on metal-to-insulator transition (niobium nitride) materials down to very low temperature. The variation of the NbN thermometer resistance has been calibrated versus temperature and magnetic field. High sensitivity in temperature variation detection is demonstrated through efficient temperature coefficient of resistance. The nitrogen content of the niobium nitride thin films can be tuned to adjust the optimal working temperature range. In the present experiment, we show the versatility of the NbN thin-film technology through applications in very different low-temperature use cases. We demonstrate that thin-film resistive thermometry can be extended to temperatures below 30 mK with low electrical impedance.
KW - Nanoscale
KW - Niobium nitride
KW - Resistive thermometry
KW - Thin film
UR - http://www.scopus.com/inward/record.url?scp=85070061343&partnerID=8YFLogxK
U2 - 10.1007/s10909-019-02222-6
DO - 10.1007/s10909-019-02222-6
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SN - 0022-2291
VL - 197
SP - 348
EP - 356
JO - Journal of Low Temperature Physics
JF - Journal of Low Temperature Physics
IS - 5-6
ER -