Nanoscale patterning of electronic devices at the amorphous LaAlO3/SrTiO3 oxide interface using an electron sensitive polymer mask

  • Anders V. Bjørlig
  • , Merlin Von Soosten
  • , Ricci Erlandsen
  • , Rasmus Tindal Dahm
  • , Yu Zhang
  • , Yulin Gan
  • , Yunzhong Chen
  • , Nini Pryds
  • , Thomas S. Jespersen

Research output: Contribution to journal › Article › peer-review

7 Scopus citations

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