Nanoscale patterning of electronic devices at the amorphous LaAlO₃/SrTiO₃ oxide interface using an electron sensitive polymer mask

Keyphrases

• SrTiO3 100%
• LaAlO3 100%
• Oxide Interfaces 100%
• Electronic Devices 100%
• Sensitive Polymers 100%
• Polymer Mask 100%
• Nanopatterning 100%
• Room Temperature 50%
• Mesoscopic 50%
• Heterostructure 50%
• Transport Properties 50%
• Processing Technology 50%
• Lateral Resolution 50%
• Complex Oxides 50%
• Low-temperature Transport 50%
• Conducting Interfaces 50%
• Local Control 50%
• Device-independent 50%
• In-plane Gate 50%
• Semiconductor Processing 50%
• Mesoscopic Device 50%

Material Science

• Heterojunction 100%
• Oxide Interface 100%
• Amorphous Material 100%
• Oxide Compound 100%