Nanoparticles and Plasmon Resonance Based Probe for Failure Analysis of ULSI Microchips and Electrical Characterizations of Metallic Interconnects

Asaf Shahmoon, A Meiri, P Livshits, Z Zalevsky

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Original languageAmerican English
Title of host publicationAdvanced Metallization Committee (AMC)
StatePublished - 2011

Bibliographical note

Place of conference:USA

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