Original language | American English |
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Title of host publication | Advanced Metallization Committee (AMC) |
State | Published - 2011 |
Nanoparticles and Plasmon Resonance Based Probe for Failure Analysis of ULSI Microchips and Electrical Characterizations of Metallic Interconnects
Asaf Shahmoon, A Meiri, P Livshits, Z Zalevsky
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review