Nanoparticles and plasmon resonance based probe for failure analysis of ULSI microchips and electrical characterizations of metallic interconnects

Asaf Shahmoon; Amihai Meiri; Pavel Livshits; Zeev Zalevsky

Nanoparticles and plasmon resonance based probe for failure analysis of ULSI microchips and electrical characterizations of metallic interconnects

Asaf Shahmoon, Amihai Meiri, Pavel Livshits, Zeev Zalevsky

Bar-Ilan University

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Original language	English
Title of host publication	Advanced Metallization Conference 2011
Pages	86-87
Number of pages	2
State	Published - 2011
Event	Advanced Metallization Conference 2011 - San Diego, CA, United States Duration: 4 Oct 2011 → 6 Oct 2011

Publication series

Name	Advanced Metallization Conference (AMC)
ISSN (Print)	1540-1766

Conference

Conference	Advanced Metallization Conference 2011
Country/Territory	United States
City	San Diego, CA
Period	4/10/11 → 6/10/11

Cite this

@inproceedings{d09d1bda5abd4d1fab7c4f705578e983,

title = "Nanoparticles and plasmon resonance based probe for failure analysis of ULSI microchips and electrical characterizations of metallic interconnects",

author = "Asaf Shahmoon and Amihai Meiri and Pavel Livshits and Zeev Zalevsky",

year = "2011",

language = "אנגלית",

isbn = "9781618394262",

series = "Advanced Metallization Conference (AMC)",

pages = "86--87",

booktitle = "Advanced Metallization Conference 2011",

note = "Advanced Metallization Conference 2011 ; Conference date: 04-10-2011 Through 06-10-2011",

}

Shahmoon, A, Meiri, A, Livshits, P & Zalevsky, Z 2011, Nanoparticles and plasmon resonance based probe for failure analysis of ULSI microchips and electrical characterizations of metallic interconnects. in Advanced Metallization Conference 2011. Advanced Metallization Conference (AMC), pp. 86-87, Advanced Metallization Conference 2011, San Diego, CA, United States, 4/10/11.

Nanoparticles and plasmon resonance based probe for failure analysis of ULSI microchips and electrical characterizations of metallic interconnects. / Shahmoon, Asaf; Meiri, Amihai; Livshits, Pavel et al.
Advanced Metallization Conference 2011. 2011. p. 86-87 (Advanced Metallization Conference (AMC)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Nanoparticles and plasmon resonance based probe for failure analysis of ULSI microchips and electrical characterizations of metallic interconnects

AU - Shahmoon, Asaf

AU - Meiri, Amihai

AU - Livshits, Pavel

AU - Zalevsky, Zeev

PY - 2011

Y1 - 2011

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AN - SCOPUS:84860150836

SN - 9781618394262

T3 - Advanced Metallization Conference (AMC)

SP - 86

EP - 87

BT - Advanced Metallization Conference 2011

T2 - Advanced Metallization Conference 2011

Y2 - 4 October 2011 through 6 October 2011

ER -

Nanoparticles and plasmon resonance based probe for failure analysis of ULSI microchips and electrical characterizations of metallic interconnects

Publication series

Conference

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Cite this