Nanoparticles and plasmon resonance based probe for failure analysis of ULSI microchips and electrical characterizations of metallic interconnects

Asaf Shahmoon, Amihai Meiri, Pavel Livshits, Zeev Zalevsky

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Original languageEnglish
Title of host publicationAdvanced Metallization Conference 2011
Number of pages2
StatePublished - 2011
EventAdvanced Metallization Conference 2011 - San Diego, CA, United States
Duration: 4 Oct 20116 Oct 2011

Publication series

NameAdvanced Metallization Conference (AMC)
ISSN (Print)1540-1766


ConferenceAdvanced Metallization Conference 2011
Country/TerritoryUnited States
CitySan Diego, CA

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