Nano-hole arrays in thin Au/Pd film on glass, for high speed molecular analysis

  • O. M. Piciu
  • , M. C.V. Der Krogt
  • , F. Tatar
  • , P. M. Sarro
  • , A. Bossche
  • , M. W. Docter
  • , Y. Garini
  • , I. T. Young

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Scopus citations

Abstract

We present an improved process technology based on e-beam lithography and lift-off technique, for fabrication of different nano-hole arrays in optically thick gold/palladium (Au/Pd=60/40) layers on transparent substrates. Every hole serves as a reaction chamber for bio-molecular analysis (e.g. antibody/antigen recognition), as part of a novel atto-liter titer plate device. The optical characterization of the hole-arrays is pursued, both for the transmission of the light and the fluorescence signal through the holes. Array structures with square and hexagonal holes' distribution, with the hole-diameters between 150nm and 200nm and periodicity of 600nm and 900nm are fabricated in 200nm thick layer of gold/palladium alloy on glass. The spectrum of the transmitted light through the hexagonally distributed nano-holes compared to the one of the square distributed nano-holes shows a 20% of light enhancement. Applying Rhodamine G6 solution (0.05mM) on top of the arrays reveals a nine time increased fluorescent signal.

Original languageEnglish
Title of host publication2006 5th IEEE Conference on Sensors
Pages608-611
Number of pages4
DOIs
StatePublished - 2006
Externally publishedYes
Event2006 5th IEEE Conference on Sensors - Daegu, Korea, Republic of
Duration: 22 Oct 200625 Oct 2006

Publication series

NameProceedings of IEEE Sensors

Conference

Conference2006 5th IEEE Conference on Sensors
Country/TerritoryKorea, Republic of
CityDaegu
Period22/10/0625/10/06

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